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Tailleur, A., Achour, A., Djouadi, M. A., Le Brizoual, L., Gautron, E. & Tristant, P. (2012) PECVD low temperature synthesis of carbon nanotubes coated with aluminum nitride. Surf. Coat. Technol. 211 18–23.
Added by: Laurent Cournède (2016-03-10 21:28:38) |
| Type de référence: Article DOI: 10.1016/j.surfcoat.2011.09.048 Numéro d'identification (ISBN etc.): 0257-8972 Clé BibTeX: Tailleur2012 Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: aluminum nitride, Carbon nanotube, growth, Nanocomposite film, plasma Créateurs: Achour, Djouadi, Gautron, Le Brizoual, Tailleur, Tristant Collection: Surf. Coat. Technol. |
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this work, vertically oriented multiwalled carbon nanotubes (MWCNTs) were synthesized at 600 degrees C by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition (ECR-PECVD) on a silicon substrate from Ni catalyst nanoparticles prepared by electrodeposition. Then CNTs were coated with aluminum nitride (AlN) by Metal Organic PECVD (MO-PECVD). The objective of this work is to obtain new nano-composite film based on AlN thin film containing oriented CNTs expected to enhance the thermal transfer compared to a single AlN layer. The final issue is the realization of thermal evacuators for microelectronic devices. Cauliflower-like structures of hexagonal AlN forming a compact thin film well coating vertically aligned CNTs were obtained and structurally characterized. (C) 2011 Published by Elsevier B.V.
Added by: Laurent Cournède |