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Avella, M., Jimenez, J., Pommereau, F., Landesman, J. P. & Rhallabi, A. (2008) Process induced mechanical stress in InP ridge waveguides fabricated by inductively coupled plasma etching. Appl. Phys. Lett. 93 131913.
Added by: Laurent Cournède (2016-03-10 21:58:41) |
| Type de référence: Article DOI: 10.1063/1.2994691 Numéro d'identification (ISBN etc.): 0003-6951 Clé BibTeX: Avella2008a Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: damage, photoluminescence, quantum-wells Créateurs: Avella, Jimenez, Landesman, Pommereau, Rhallabi Collection: Appl. Phys. Lett. |
Consultations : 1/1043
Indice de consultation : 7% Indice de popularité : 1.75% |
| Résumé |
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Inductively coupled plasma (ICP) etching is suitable for producing semiconductor structures with a high aspect ratio. While the morphology of the structures is very satisfactory, less is known about other aspects related to the process, but with potential influence in the optical performance of the devices. We present herein a study of the mechanical stresses produced by the ICP process in the fabrication of ridge waveguides in InP. Stresses purely induced by the process are revealed by the spectral analysis of the cathodoluminescence. A dependence of the stress distribution on the aspect ratio of the waveguides is demonstrated. (C) 2008 American Institute of Physics.
Added by: Laurent Cournède |