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Elmazria, O., Zhgoon, S., Le Brizoual, L., Sarry, F., Tsimbal, D. & Djouadi, M. A. (2009) AlN/ZnO/diamond structure combining isolated and surface acoustic waves. Appl. Phys. Lett. 95 233503.
Added by: Laurent Cournède (2016-03-10 21:41:22) |
| Type de référence: Article DOI: 10.1063/1.3270536 Numéro d'identification (ISBN etc.): 0003-6951 Clé BibTeX: Elmazria2009 Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: boundary waves, Interface Créateurs: Djouadi, Elmazria, Le Brizoual, Sarry, Tsimbal, Zhgoon Collection: Appl. Phys. Lett. |
Consultations : 1/521
Indice de consultation : 3% Indice de popularité : 0.75% |
| Résumé |
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In order to generate surface acoustic waves (SAW) and waveguiding layer acoustic waves (WLAW) simultaneously, a multilayer structure of AlN/ZnO/diamond has been proposed. This structure has been investigated theoretically (two-dimensional finite element method) and experimentally. The nature of the excited modes and their order were identified by modeling and confirmed experimentally by measuring the frequency response of the device in the air and in contact with the liquid. The demonstrated structure can be used to realize a packageless sensor or resonator, using the WLAW alone. A temperature compensated gas or liquid sensor can also be realized by combined usage of the SAW and the WLAW. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3270536]
Added by: Laurent Cournède |