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Li, D., Carette, M., Granier, A., Landesman, J. P. & Goullet, A. (2012) Spectroscopic ellipsometry analysis of TiO2 films deposited by plasma enhanced chemical vapor deposition in oxygen/titanium tetraisopropoxide plasma. Thin Solid Films, 522 366–371.
Added by: Laurent Cournède (2016-03-10 21:28:38) |
| Type de référence: Article DOI: 10.1016/j.tsf.2012.07.091 Numéro d'identification (ISBN etc.): 0040-6090 Clé BibTeX: Li2012 Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: anatase, crystalline tio2, electron-beam evaporation, growth, low-temperature, mechanisms, optical properties, optical-properties, pecvd, Plasma enhanced chemical vapour deposition, rutile, spectroscopic ellipsometry, thin-films, Titanium dioxide Créateurs: Carette, Goullet, Granier, Landesman, Li Collection: Thin Solid Films |
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TiO2 thin films were deposited at low pressure and temperature on silicon substrates using plasma enhanced chemical vapor deposition in oxygen rich O-2/titanium tetraisopropoxide inductively coupled radiofrequency plasmas. The influence of substrate bias V-b({\textbar}V-b{\textbar}{<}= 50 V) on the film properties was investigated. The results obtained by fitting ellipsometry spectra in the 1.5-6 eV range, using a three-sublayer physical model, are in good agreement with the film morphology when no bias is applied or V-b=-10 V. The refractive indices in the transparent range are enhanced at V-b=-50 V, according to a physical model which only includes a homogenous layer and a top roughness layer. Scanning electron microscopic views show that all the films exhibit a columnar structure, but layer compactness and organization increase with the bias. The film structure evolution as a function of V-b is also evidenced on the refractive index dispersion curves. Complementary X-ray diffraction and Fourier transform infrared spectroscopy measurements show that films are basically amorphous mixed with a small amount of anatase at the floating potential (V-b=0), whereas applying a bias voltage leads to the enhancement of anatase phase and the appearance of rutile phase (V-b=-50 V). (C) 2012 Elsevier B.V. All rights reserved.
Added by: Laurent Cournède |