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Nguyen, D. T., Ferrec, A., Keraudy, J., Richard-Plouet, M., Goullet, A., Cattin, L., Brohan, L. & Jouan, P. .-Y. (2014) Ellipsometric and XPS characterization of transparent nickel oxide thin films deposited by reactive HiPIMS. Surf. Coat. Technol. 250 21–25.
Added by: Laurent Cournède (2016-03-10 21:01:55) |
| Type de référence: Article DOI: 10.1016/j.surfcoat.2014.02.014 Numéro d'identification (ISBN etc.): 0257-8972 Clé BibTeX: Nguyen2014b Voir tous les détails bibliographiques  |
Catégories: CESES, PCM Mots-clés: Ellipsometry, Nickel oxide, nio, p-Type semi-conductor, Reactive HiPIMS, X-ray photoelectron spectroscopy Créateurs: Brohan, Cattin, Ferrec, Goullet, Jouan, Keraudy, Nguyen, Richard-Plouet Collection: Surf. Coat. Technol. |
Consultations : 3/559
Indice de consultation : 3% Indice de popularité : 0.75% |
| Résumé |
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We have deposited transparent p-type semiconductive NiO thin films by reactive HiPIMS which appeared to be a powerful method to produce thin films exhibiting gradients of chemical compositions and opto-electronic properties. For a fixed amount of oxygen in the discharge (9\%), the influence of the pulse duration was investigated. The position of the valence band with respect to the Fermi level was evaluated by X-ray Photoelectron Spectroscopy (XPS), for two different pulse durations, 15 and 30 mu s. We have then investigated the dependence of optical properties of NiO films using spectroscopic ellipsometry (1.5-5.0 eV range). Refractive index n, extinction coefficient k, and gap energy of the NiO films were determined with a refractive index gradient decreasing along the film growth direction. (C) 2014 Elsevier B.V. All rights reserved.
Added by: Laurent Cournède |