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Li, D., Dai, S., Goullet, A. & Granier, A. (2018) The Effect of Plasma Gas Composition on the Nanostructures and Optical Properties of TiO2 Films Prepared by Helicon-PECVD. Nano, 13 1850124.
Added by: Richard Baschera (2018-12-20 08:24:17) Last edited by: Richard Baschera (2018-12-20 08:33:31) |
| Type de référence: Article DOI: 10.1142/S1793292018501242 Numéro d'identification (ISBN etc.): 1793-2920 Clé BibTeX: Li2018b Voir tous les détails bibliographiques  |
Catégories: INTERNATIONAL, PCM Mots-clés: anatase, chemical-vapor-deposition, enhanced performance, ion-bombardment, optical properties, Oxides, plasma deposition, room-temperature, silicon, sol-gel method, structural-properties, thin films, thin-films, titanium-dioxide Créateurs: Dai, Goullet, Granier, Li Collection: Nano |
Consultations : 1/464
Indice de consultation : 5% Indice de popularité : 1.25% |
| Résumé |
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TiO2 films were deposited from oxygen/titanium tetraisopropoxide (TTIP) plasmas at low temperature by Helicon-PECVD at floating potential (V-f) or substrate self-bias of -50 V. The influence of titanium precursor partial pressure on the morphology, nanostructure and optical properties was investigated. Low titanium partial pressure ([TTIP] {<} 0.013 Pa) was applied by controlling the TTIP flow rate which is introduced by its own vapor pressure, whereas higher titanium partial pressure was formed through increasing the flow rate by using a carrier gas (CG). Then the precursor partial pressures [TTIP+CG] = 0.027 Pa and 0.093 Pa were obtained. At V-f, all the films exhibit a columnar structure, but the degree of inhomogeneity is decreased with the precursor partial pressure. Phase transformation from anatase ([TTIP] {<} 0.013 Pa) to amorphous ([TTIP+CG] = 0.093 Pa) has been evidenced since the O(2)(+ )ion to neutral flux ratio in the plasma was decreased and more carbon contained in the film. However, in the case of -50 V, the related growth rate for different precursor partial pressures is slightly (similar to 15%) decreased. The columnar morphology at [TTIP] {<} 0.013 Pa has been changed into a granular structure, but still homogeneous columns are observed for [TTIP+CG] = 0.027 Pa and 0.093 Pa. Rutile phase has been generated at [TTIP] {<} 0.013 Pa. Ellipsometry measurements were performed on the films deposited at -50 V; results show that the precursor addition from low to high levels leads to a decrease in refractive index.
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