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Begou, T., Becheb, B., Goullet, A., Granier, A., Cardinaud, C., Gaviot, E., Raballand, V., Landesman, J. P. & Zyss, J. (2006) Photonics integrated circuits on plasma-polymer-HMDSO: Single-mode TE(00)-TM(00) straight waveguides, S-bends, Y-junctions and mach-zehnder interferometers. Iecon 2006 - 32nd Annual Conference on Ieee Industrial Electronics, Vols 1-11 New York.
Added by: Florent Boucher (2016-05-12 13:21:38) |
| Type de référence: Chapitre/Section Numéro d'identification (ISBN etc.): 978-1-4244-0135-2 Clé BibTeX: Begou2006 Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: deposition, Ellipsometry, films, helicon reactor, sio2 Créateurs: Becheb, Begou, Cardinaud, Gaviot, Goullet, Granier, Landesman, Raballand, Zyss Éditeur: Ieee (New York) Collection: Iecon 2006 - 32nd {Annual} {Conference} on {Ieee} {Industrial} {Electronics}, {Vols} 1-11 |
Consultations : 1/700
Indice de consultation : 5% Indice de popularité : 1.25% |
| Résumé |
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The authors present the design, realization and characterization of photonics integrated circuits made up of organosilicon (SiO(x)C(y)H(z)) materials called HexaMethylDiSilOxane plasma polymers (pp-HMDSO), elaborated by Plasma Enhanced Chemical Vapour Deposition (PECVD). Such a versatile technique offers the noticeable advantage to allow the control of respectively; the value of the refractive indices, the thickness of each layer while entailing a lower stress, as the gas proportion of precursors (HMDSO) and plasma conditions are conveniently adjusted. The cladding and core layers of such waveguides have been elaborated into the same reactor thanks to the same precursors with relevant changes regarding the plasma parameters. Then, various integrated photonics devices have been realized, from planar and single-mode rib waveguides to more complex structures like S-bends, Y-junctions, and Mach Zehnder Interferometers (MZI). Such structures prove to yield a good single-mode confinement for both polarisations. Moreover optical losses ascribed to pp-HMDSO structures have been respectively evaluated to 5,6 dB.cm(-1) and 11,5 dB CM for TE(00) and TM(00) optical modes. Hence, pp-HMDSO and PECVD appear as quite promising techniques for devising ultra-integrated components like microresonators, and many another functional devices.
Added by: Florent Boucher |