Aissa, A. K., Achour, A., Camus, J., Le Brizoual, L., Jouan, P. .-Y. & Djouadi, M. .-A. (2014) Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures. Thin Solid Films, 550 264–267.
Added by: Florent Boucher (2016-04-29 09:26:45)
|Type de référence: Article
Numéro d'identification (ISBN etc.): 0040-6090
Clé BibTeX: Aissa2014a
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|Catégories: ID2M, PCM
Mots-clés: Aluminium nitride, dc magnetron sputtering, densities, discharges, High power impulse magnetron sputtering, physical vapor-deposition, plasmas, Residual stress, transmission electron microscopy, X-ray diffraction
Créateurs: Achour, Aissa, Camus, Djouadi, Jouan, Le Brizoual
Collection: Thin Solid Films
Consultations : 12/595
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Aluminium nitride (AlN) films were deposited by dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) on (100) oriented silicon (Si) substrates, in Ar-N-2 gas mixture, at different working pressures. The films were characterized using X-ray diffraction (XRD), profilometer and transmission electron microscopy (TEM). The effect of the sputtering pressure on the structure, the residual stress and the deposition rate of AlN films deposited by the two processes (dcMS and HiPIMS) was investigated. It was found that the deposition rate is always lower in HiPIMS compared to dcMS. The AlN films are textured along (002) direction in both cases of dcMS and HiPIMS as it is indicated by XRD measurements, with residual stresses which are more important in the case of films deposited by HiMIPS. These residual stresses decrease with the sputtering pressure increase, especially in the case of the films deposited by HiPIMS. TEM analyses have shown a local epitaxial growth of AlN on the Si substrate which would favour thermal evacuation improvement of AlN as thermal interface material. (C) 2013 Elsevier B.V. All rights reserved.
Added by: Florent Boucher