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Tranchant, J., Angleraud, B., Han, X. L., Landesman, J. P. & Tessier, P. Y. (2007) Carbon nanochannels elaborated by buckle delamination control on patterned substrates. Appl. Phys. Lett. 91 013103.
Added by: Laurent Cournède (2016-03-10 22:02:30) |
| Type de référence: Article DOI: 10.1063/1.2753536 Numéro d'identification (ISBN etc.): 0003-6951 Clé BibTeX: Tranchant2007 Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: deposition, nanofluidic channels, thin-films Créateurs: Angleraud, Han, Landesman, Tessier, Tranchant Collection: Appl. Phys. Lett. |
Consultations : 1/960
Indice de consultation : 6% Indice de popularité : 1.5% |
| Résumé |
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Carbon nanochannels were achieved using lithographically patterned lines on a silicon substrate as a template to control the buckle delamination of highly equibiaxial compressively stressed thin films. Carbon films were synthesized by ionized physical vapor deposition through inductively coupled plasma magnetron sputtering. The obtained structures exhibit dimensions as small as 500 nm wide and 80 nm high, and may be used in nanofluidic applications. Results regarding the characterization of their growth mechanism and structural analyses by Raman microspectroscopy are presented. (C) 2007 American Institute of Physics.
Added by: Laurent Cournède |