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Chaigneau, M., Minea, T. & Louarn, G. (2007) Comparative study of different process steps for the near-field optical probes manufacturing. Ultramicroscopy, 107 1042–1047.
Added by: Laurent Cournède (2016-03-10 22:02:29) |
| Type de référence: Article DOI: 10.1016/j.ultramic.2007.02.047 Numéro d'identification (ISBN etc.): 0304-3991 Clé BibTeX: Chaigneau2007 Voir tous les détails bibliographiques  |
Catégories: PMN Mots-clés: aperture probes, diffraction, fabrication, microscopy, near-field optical probes, temperature Créateurs: Chaigneau, Louarn, Minea Collection: Ultramicroscopy |
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This paper deals with different methods for the manufacturing of near-field optical probes with nanometric aperture. After the wet chemical etching of the fiber, two metallization processes are compared: the well-known thermal evaporation versus the novel arrangement of plasma sputtering. Further, it is reported an original controlled nano-indentation in the smooth softness surface to produce the apex aperture of the tapered fiber. These apertures present thin protrusions, but they show good optical and topographic resolutions. Besides, the probe sensitivity is discussed with respect to the multi- and single-mode of the primary optical fiber for imaging sub-wavelength dimension objects in the collection mode. (c) 2007 Published by Elsevier B.V.
Added by: Laurent Cournède |