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Le Brizoual, L., Elmazria, O., Zghoon, S., Soussou, A., Sarry, F. & Djouadi, M. A. (2009) Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications. 2009 Joint Meeting of the European Frequency and Time Forum and the Ieee International Frequency Control Symposium, Vols 1 and 2 New York.
Added by: Laurent Cournède (2016-03-10 21:41:25) |
| Type de référence: Chapitre/Section Numéro d'identification (ISBN etc.): 978-1-4244-3511-1 Clé BibTeX: LeBrizoual2009 Voir tous les détails bibliographiques  |
Catégories: PCM Mots-clés: boundary waves, Finite element modeling, Interface, Isoluted acoustic wave, Surface Créateurs: Djouadi, Elmazria, Le Brizoual, Sarry, Soussou, Zghoon Éditeur: Ieee (New York) Collection: 2009 {Joint} {Meeting} of the {European} {Frequency} and {Time} {Forum} and the {Ieee} {International} {Frequency} {Control} {Symposium}, {Vols} 1 and 2 |
Consultations : 1/597
Indice de consultation : 4% Indice de popularité : 1% |
| Résumé |
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We present a theoretical calculation and experimental results for an isolated acoustic wave. The experimental device is modeled by finite element method (FEM) for the structure AlN/ZnO/diamond. The phase velocity in the AIN/ZnO/diamond structure was investigated by theoretical calculations. It was found that the AlN thickness must he at least more than 3 lambda/2 to obtain a negligible surface displacement. In the same way the ZnO thickness for a fixed value of AlN at 2 lambda must be higher than lambda/4 to confine the acoustic wave. The coupling of the wave presents an optimum around lambda 2 for the ZnO layer thichness.
Added by: Laurent Cournède |