Le Brizoual, L., Elmazria, O., Zhgoon, S., Soussou, A., Sarry, F. & Djouadi, M. A. (2010) AlN/ZnO/Diamond Waveguiding Layer Acoustic Wave Structure: Theoretical and Experimental Results. IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 57 1818–1824.
Added by: Laurent Cournède (2016-03-10 21:37:32) |
Type de référence: Article DOI: 10.1109/TUFFC.2010.1620 Numéro d'identification (ISBN etc.): 0885-3010 Clé BibTeX: LeBrizoual2010 Voir tous les détails bibliographiques |
Catégories: PCM Mots-clés: boundary waves, Interface, Surface Créateurs: Djouadi, Elmazria, Le Brizoual, Sarry, Soussou, Zhgoon Collection: IEEE Trans. Ultrason. Ferroelectr. Freq. Control |
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Résumé |
We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3 lambda/2 to obtain negligible surface displacement. In the same way, the ZnO thickness for a fixed value of AlN thickness at 2 lambda must be larger than lambda/4 to confine the acoustic wave. The electromechanical coupling of the wave presents an optimum around lambda/2 for the ZnO layer thickness. A first experimental AlN/ZnO/diamond device has been developed and shows the WLAW at 412 MHz.
Added by: Laurent Cournède |