Baudet, E., Sergent, M., Nemec, P., Cardinaud, C., Rinnert, E., Michel, K., Jouany, L., Bureau, B. & Nazabal, V. (2017) Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. Scientific Reports, 7 3500. |
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Baudet, E., Cardinaud, C., Girard, A., Rinnert, E., Michel, K., Bureau, B. & Nazabal, V. (2016) Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies. Journal of Non-Crystalline Solids, 444 64–72. |
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Last edited by: administrateur 2016-08-25 14:00:55 |
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Meyer, T., Girard, A., Bouška, M., Baudet, E., Baillieul, M., Nemec, P., Nazabal, V. & Cardinaud, C. (2023) Mass spectrometry and in situ x-ray photoelectron spectroscopy investigations of organometallic species induced by the etching of germanium, antimony and selenium in a methane-based plasma. Plasma Sources Sci. Technol. 32 085003. |
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Meyer, T., LeDain, G., Girard, A., Rhallabi, A., Bouška, M., Nemec, P., Nazabal, V. & Cardinaud, C. (2020) Etching of GeSe2 chalcogenide glass and its pulsed laser deposited thin films in SF6, SF6/Ar and SF6/O-2 plasmas. Plasma Sources Sci. Technol. 29 105006. |
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Last edited by: Richard Baschera 2020-11-17 14:03:42 |
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Meyer, T., Girard, A., LeDain, G., Rhallabi, A., Baudet, E., Nazabal, V., Nemec, P. & Cardinaud, C. (2021) Surface composition and micromasking effect during the etching of amorphous Ge-Sb-Se thin films in SF6 and SF6 /Ar plasmas. Applied Surface Science, 549 149192. |
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Last edited by: Richard Baschera 2021-04-09 11:41:07 |
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Verger, F., Nazabal, V., Colas, F., Nemec, P., Cardinaud, C., Baudet, E., Chahal, R., Rinnert, E., Boukerma, K., Peron, I., Deputier, S., Guilloux-Viry, M., Guin, J. P., Lhermite, H., Moreac, A., Compere, C. & Bureau, B. (2013) RF sputtered amorphous chalcogenide thin films for surface enhanced infrared absorption spectroscopy. Opt. Mater. Express, 3 2112–2131. |
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Added by: Laurent Cournède 2016-03-10 21:23:29 |
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