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Keraudy, J., Boyd, R. D., Shimizu, T., Helmersson, U. & Jouan, P. .-Y. (2018) Phase separation within NiSiN coatings during reactive HiPIMS discharges: A new pathway to grow NixSi nanocrystals composites at low temperature. Applied Surface Science, 454 148–156. |
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Kovacevic, E., Hussain, S., Berndt, J., Pattyn, C., Strunskus, T., Ammar, M. R., Canizares, A., Simon, P., Tatarova, E., Dias, A., Tessier, P. Y. & Boulmer-Leborgne, C. (2017) Plasma Synthesis of Conductive Carbon Based Nanomaterials. Mascher, P. & Cvelbar, U. (Eds.), Plasma Nano Science and Technology. |
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Lallement, L., Gosse, C., Cardinaud, C., Peignon-Fernandez, M. .-C. & Rhallabi, A. (2010) Etching studies of silica glasses in SF6/Ar inductively coupled plasmas: Implications for microfluidic devices fabrication. J. Vac. Sci. Technol. A, 28 277–286. |
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Lallement, L., Rhallabi, A., Cardinaud, C. & Fernandez, M. C. P. (2011) Modelling of fluorine based high density plasma for the etching of silica glasses. J. Vac. Sci. Technol. A, 29 051304. |
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Lambare, C., Tessier, P. .-Y., Poncin-Epaillard, F. & Debarnot, D. (2015) Plasma functionalization and etching for enhancing metal adhesion onto polymeric substrates. RSC Adv. 5 62348–62357. |
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Lamkaouane, H., Ftouhi, H., Richard-Plouet, M., Gautier, N., Stephant, N., Zazoui, M., Addou, M., Cattin, L., Bernede, J. C., Mir, Y. & Louarn, G. (2022) Efficient and Facile Synthetic Route of MoO3:MoS2 Hybrid Thin Layer via Oxidative Reaction of MoS2 Nanoflakes. Nanomaterials, 12 3171. |
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Landesman, J.-P., Jimenez, J., Levallois, C., Pommereau, F., Frigeri, C., Torres, A., Leger, Y., Beck, A. & Rhallabi, A. (2016) Defect formation during chlorine-based dry etching and their effects on the electronic and structural properties of InP/InAsP quantum wells. Journal of Vacuum Science & Technology A, 34 041304. |
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Landesman, J. P., Levallois, C., Jimenez, J., Pommereau, F., Leger, Y., Beck, A., Delhaye, T., Torres, A., Frigeri, C. & Rhallabi, A. (2015) Evidence of chlorine ion penetration in InP/InAsP quantum well structures during dry etching processes and effects of induced-defects on the electronic and structural behaviour. Microelectron. Reliab. 55 1750–1753. |
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Le Bihan, F., Donero, L., Le Borgne, B., De Sagazan, O., Tessier, P.-Y., El Mel, A.-A., Kovacevic, E. & Le Brizoual, L. (2018) Dual-Gate TFT For Chemical Detection. Kuo, Y. (Ed.), Thin Film Transistor Technologies 14 (tftt 14). |
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Le Borgne, B., Girard, A., Cardinaud, C., Salaun, A.-C., Pichon, L. & Geneste, F. (2018) Covalent functionalization of polycrystalline silicon nanoribbons applied to Pb(II) electrical detection. Sensors and Actuators B-Chemical, 268 368–375. |
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Le Brizoual, L., Elmazria, O., Zhgoon, S., Soussou, A., Sarry, F. & Djouadi, M. A. (2010) AlN/ZnO/Diamond Waveguiding Layer Acoustic Wave Structure: Theoretical and Experimental Results. IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 57 1818–1824. |
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Le Brizoual, L., Elmazria, O., Zghoon, S., Soussou, A., Sarry, F. & Djouadi, M. A. (2009) Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications. 2009 Joint Meeting of the European Frequency and Time Forum and the Ieee International Frequency Control Symposium, Vols 1 and 2 New York. |
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Le Dain, G., Rhallabi, A., Fernandez, M. C., Boufnichel, M. & Roqueta, F. (2017) Multiscale approach for simulation of silicon etching using SF6/C4F8 Bosch process. Journal of Vacuum Science & Technology A, 35 03E113. |
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Le Dain, G., Rhallabi, A., Cardinaud, C., Girard, A., Fernandez, M.-C., Boufnichel, M. & Roqueta, F. (2018) Modeling of silicon etching using Bosch process: Effects of oxygen addition on the plasma and surface properties. Journal of Vacuum Science & Technology A, 36 03E109. |
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Le Dain, G., Rhallabi, A., Girard, A., Cardinaud, C., Roqueta, F. & Boufnichel, M. (2019) Modeling of C4F8 inductively coupled plasmas: effects of high RF power on the plasma electrical properties. Plasma Sources Science & Technology, 28 085002. |
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Lebreton, A., Besland, M.-P., Jouan, P.-Y., Signe, T., Mannequin, C., Richard-Plouet, M., Le Granvalet, M., Lethien, C., Brousse, T. & Barbe, J. (2024) Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors. Journal of Vacuum Science & Technology A, 42 023405. |
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Lecuyer, P., Fremont, H., Landesman, J. .-P. & Bahi, M. .-A. (2010) Wearout estimation using the Robustness Validation methodology for components in 150 degrees C ambient automotive applications. Microelectron. Reliab. 50 1744–1749. |
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Li, D., Dai, S., Goullet, A. & Granier, A. (2018) The Effect of Plasma Gas Composition on the Nanostructures and Optical Properties of TiO2 Films Prepared by Helicon-PECVD. Nano, 13 1850124. |
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Li, D., Gautier, N., Dey, B., Bulou, S., Richard-Plouet, M., Ravisy, W., Goullet, A., Choquet, P. & Granier, A. (2019) TEM analysis of photocatalytic TiO2 thin films deposited on polymer substrates by low-temperature ICP-PECVD. Applied Surface Science, 491 116–122. |
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Li, D., Dai, S., Li, J., Zhang, C., Richard-Plouet, M., Goullet, A. & Granier, A. (2018) Microstructure and Photocatalytic Properties of TiO2-Reduced Graphene Oxide Nanocomposites Prepared by Solvothermal Method. J. Electron. Mater. 47 7372–7379. |
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Li, D., Dai, S., Goullet, A. & Granier, A. (2019) Ion impingement effect on the structure and optical properties of TixSi1-xO2 films deposited by ICP-PECVD. Plasma Processes and Polymers, 16 1900034. |
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Li, D., Dai, S., Goullet, A., Carette, M., Granier, A. & Landesman, J. P. (2018) Annealing and biasing effects on the structural and optical properties of PECVD-grown TiO2 films from TTIP/O-2 plasma. Journal of Materials Science-Materials in Electronics, 29 13254–13264. |
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Li, D., Carette, M., Granier, A., Landesman, J. P. & Goullet, A. (2012) Spectroscopic ellipsometry analysis of TiO2 films deposited by plasma enhanced chemical vapor deposition in oxygen/titanium tetraisopropoxide plasma. Thin Solid Films, 522 366–371. |
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Li, D., Carette, M., Granier, A., Landesman, J. P. & Goullet, A. (2015) Effect of ion bombardment on the structural and optical properties of TiO2 thin films deposited from oxygen/titanium tetraisopropoxide inductively coupled plasma. Thin Solid Films, 589 783–791. |
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Li, D., Goullet, A., Carette, M., Granier, A. & Landesman, J. P. (2016) Effect of growth interruptions on TiO2 films deposited by plasma enhanced chemical vapour deposition. Mater. Chem. Phys. 182 409–417. |
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Li, D., Elisabeth, S., Granier, A., Carette, M., Goullet, A. & Landesman, J.-P. (2016) Structural and Optical Properties of PECVD TiO2-SiO2 Mixed Oxide Films for Optical Applications. Plasma Process. Polym. 13 918–928. |
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Li, D., Goullet, A., Carette, M., Granier, A., Zhang, Y. & Landesman, J. P. (2016) Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O-2/TTIP helicon reactor. Vacuum, 131 231–239. |
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Liu, B., Landesman, J. .-P., Leclercq, J. .-L., Rhallabi, A., Avella, M., Gonzalez, M. A., Jimenez, J., Guilet, S., Cardinaud, C. & Pommereau, F. (2006) InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides New York, Ieee. |
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Liu, C. E., Richard-Plouet, M., Albertini, D., Besland, M. P. & Brohan, L. (2008) Bi3.25La0.75Ti3O12 films on La2Ti2O7 thin films prepared by chemical solution deposition - art. no. 012014. Finnis, M. W., Hoffmann, M. J. & GautierSoyer, M. (Eds.), Interfacial Nanostructures in Ceramics: A Multiscale Approach Bristol. |
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Liu, B., Landesman, J. .-P., Leclercq, J. .-L., Rhallabi, A., Cardinaud, C., Guilet, S., Pommereau, F., Avella, M., Gonzalez, M. A. & Jimenez, J. (2006) InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides. Mater. Sci. Semicond. Process, 9 225–229. |
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Liu, C.-E., Rouet, A., Sutrisno, H., Puzenat, E., Terrisse, H., Brohan, L. & Richard-Plouet, M. (2008) Low temperature synthesis of nanocrystallized titanium oxides with layered or tridimensional frameworks, from [Ti8O12(H2O)(24)]Cl-8 center dot HCl center dot 7H(2)O hydrolysis. Chem. Mat. 20 4739–4748. |
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Luais, E., Boujtita, M., Gohier, A., Tailleur, A., Casimirius, S., Djouadi, M. A., Granier, A. & Tessier, P. Y. (2010) Response to "Comments on 'Carbon nanowalls as material for electrochemical tranducers' " [Appl. Phys. Lett. 96 126102 (2010)]. Appl. Phys. Lett. 96 126103. |
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Luais, E., Thobie-Gautier, C., Tailleur, A., Djouadi, M. .-A., Granier, A., Tessier, P. Y., Debarnot, D., Poncin-Epaillard, F. & Boujtita, M. (2010) Preparation and modification of carbon nanotubes electrodes by cold plasmas processes toward the preparation of amperometric biosensors. Electrochim. Acta, 55 7916–7922. |
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Luais, E., Boujtita, M., Gohier, A., Tailleur, A., Casimirius, S., Djouadi, M. A., Granier, A. & Tessier, P. Y. (2008) Integration of a carbon nanotube based electrode in silicon microtechnology to fabricate electrochemical transducers. Nanotechnology, 19 435502. |
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Marcos, G., Rhallabi, A. & Ranson, P. (2008) Properties of deep etched trenches in silicon: Role of the angular dependence of the sputtering yield and the etched species redeposition. Appl. Surf. Sci. 254 3576–3584. |
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